Astrova E. V., Li (Fedulova) G.V., Lozhkina D.A., Parfeneva (Chernienko) A.V..
Field of research:
- Electrochemical etching of n and p-Si. Macro- and meso- porous silicon. Periodic and random structures with a high aspect ratio of pore depth to diameter. Studies of anisotropy effects in pore formation.
- Anisotropic chemical etching of silicon. Wall array structures of high aspect ratio on (110)-oriented silicon substrate.
- Silicon microphotonics and integrated optics: 1D и 2D photonic crystals of middle IR spectral range, microcavities and photonic crystal heterojunctions. Optical anisotropic media. Composite structures Si-liquid crystal. Tunable photonic crystals and microcavities.
- Si based anodes for Li-ion batteries: periodic and random macroporous silicon, sintering of Si nano-powder, carbonization of Si and SiO by means of fluorocarbon. Whiskers of silicon carbide and its role in anode material.
Equipment and processing:
Computer-aided set up for photoelectrochemical etching from ET&TE company (Germany), set up for anisotropic chemical etching in KOH, photolithography, high temperature treatment in inert atmosphere, pressing of powders, diffusion doping, thermal oxidation, vacuum evaporation, galvanic deposition of metals.
|E.V. Astrovaemail@example.com||+7 (812) 292-79-57|
|G.V. Lifirstname.lastname@example.org||+7 (812) 292-79-57|